Quick Answer
AXCELIS TECHNOLOGIES INC reported R&D Expense of $108.96 million for fiscal year 2025.
AXCELIS TECHNOLOGIES INC R&D Expense — Annual History
| Fiscal Year | R&D Expense | YoY Change |
|---|---|---|
| 2025 | $108.96M | +3.3% |
| 2024 | $105.50M | +8.9% |
| 2023 | $96.91M | +23.7% |
| 2022 | $78.36M | +19.8% |
| 2021 | $65.43M | +5.8% |
| 2020 | $61.83M | +14.7% |
| 2019 | $53.93M | +4.0% |
| 2018 | $51.88M | +20.4% |
| 2017 | $43.07M | +25.2% |
| 2016 | $34.40M | +5.6% |
| 2015 | $32.59M | -2.8% |
| 2014 | $33.53M | -3.5% |
| 2013 | $34.76M | -14.0% |
| 2012 | $40.40M | -14.4% |
| 2011 | $47.18M | +19.4% |
| 2010 | $39.52M | +21.0% |
| 2009 | $32.66M | — |
Quarterly R&D Expense
| Quarter Ending | R&D Expense | YoY | QoQ |
|---|---|---|---|
| September 30, 2025 | $24.64M | -6.6% | -9.0% |
| June 30, 2025 | $27.06M | +5.0% | -0.2% |
| March 31, 2025 | $27.13M | +5.7% | +2.8% |
| September 30, 2024 | $26.39M | +9.6% | +2.4% |
| June 30, 2024 | $25.79M | +6.9% | +0.5% |
| March 31, 2024 | $25.66M | +7.9% | +6.5% |
| September 30, 2023 | $24.09M | +17.2% | -0.2% |
| June 30, 2023 | $24.13M | +28.8% | +1.5% |
- AXCELIS TECHNOLOGIES INC showed an increase of +3.3% in R&D Expense compared to the prior fiscal year.
- Over the 2009–2025 period, AXCELIS TECHNOLOGIES INC’s r&d expense has grown by 233.6% (from $32.66 million to $108.96 million).
- The most recent figure is from AXCELIS TECHNOLOGIES INC’s fiscal year 2025 report (Form 10-K), filed with the SEC on February 26, 2026.
- All figures are sourced from SEC EDGAR XBRL filings, last verified June 17, 2026.
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