Quick Answer
ONTO INNOVATION INC. reported R&D Expense of $131.98 million for fiscal year 2025.
ONTO INNOVATION INC. R&D Expense — Annual History
| Fiscal Year | R&D Expense | YoY Change |
|---|---|---|
| 2025 | $131.98M | +15.9% |
| 2024 | $113.86M | +9.0% |
| 2023 | $104.44M | -6.7% |
| 2022 | $111.95M | +16.5% |
| 2021 | $96.12M | +13.6% |
| 2020 | $84.58M | +74.9% |
| 2019 | $48.36M | +21.0% |
| 2018 | $39.95M | +6.0% |
| 2017 | $37.69M | +19.9% |
| 2016 | $31.44M | -3.8% |
| 2015 | $32.70M | -3.2% |
| 2014 | $33.78M | +3.2% |
| 2013 | $32.71M | +10.6% |
| 2012 | $29.59M | +27.0% |
| 2011 | $23.29M | +22.8% |
| 2010 | $18.97M | +29.3% |
| 2009 | $14.67M | — |
Quarterly R&D Expense
| Quarter Ending | R&D Expense | YoY | QoQ |
|---|---|---|---|
| September 30, 2025 | $32.49M | +14.9% | -7.9% |
| June 30, 2025 | $35.29M | +30.5% | +25.9% |
| March 31, 2025 | $28.03M | +5.6% | -0.9% |
| September 30, 2024 | $28.28M | +8.2% | +4.6% |
| June 30, 2024 | $27.04M | +0.0% | +1.8% |
| March 31, 2024 | $26.55M | -2.5% | +1.6% |
| September 30, 2023 | $26.14M | -18.7% | -3.4% |
| June 30, 2023 | $27.04M | +5.5% | -0.7% |
- ONTO INNOVATION INC. showed an increase of +15.9% in R&D Expense compared to the prior fiscal year.
- Over the 2009–2025 period, ONTO INNOVATION INC.’s r&d expense has grown by 799.5% (from $14.67 million to $131.98 million).
- The most recent figure is from ONTO INNOVATION INC.’s fiscal year 2024 report (Form 10-K), filed with the SEC on February 24, 2026.
- All figures are sourced from SEC EDGAR XBRL filings, last verified June 17, 2026.
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